Magnetron sputtered hydrogenated carbon nitride: structural and optical properties of as-deposited and postannealed films

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Akihiro Itakura, Akiyoshi Uchida, Toshikazu Kanaoka, Masakazu Taguchi, Michio Matsuura.

Japanese Journal of Applied Physics 42 [Part 1, No. 11] 7057-7061. 2003.

作成時刻: 2016-05-24 11:55:58 +0900 更新時刻: 2026-09-29 04:20:44 +0900