Quasi-1D edge contact to hBN-encapsulated multilayered graphene by SF6 dry etch

Ryuichi Tsuchikawa; David Castro; Swastik Ballav; Michael S. Lodge; Kenji Watanabe; Takashi Taniguchi; Masa Ishigami; Robert E. Peale; Ryuichi Tsuchikawa; David Castro; Swastik Ballav; Michael S. Lodge; Masa Ishigami; Robert E. Peale; Ryuichi Tsuchikawa; David Castro; Swastik Ballav; Michael S. Lodge; Kenji Watanabe; Takashi Taniguchi; Masa Ishigami; Robert E. Peale; Ryuichi Tsuchikawa; David Castro; Swastik Ballav; Michael S. Lodge; Masa Ishigami; Robert E. Peale

doi:10.1557/s43580-025-01276-x

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Quasi-1D edge contact to hBN-encapsulated multilayered graphene by SF6 dry etch

Ryuichi Tsuchikawa, David Castro, Swastik Ballav, Michael S. Lodge, Kenji Watanabe, Takashi Taniguchi, Masa Ishigami, Robert E. Peale, Ryuichi Tsuchikawa, David Castro, Swastik Ballav, Michael S. Lodge, Masa Ishigami, Robert E. Peale.

MRS Advances 10 [10] 1271-1276. 2025.

https://doi.org/10.1557/s43580-025-01276-x

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MDRavailable Quasi-1D edge contact to hBN-encapsulated multilayered graphene by SF6 dry etch

作成時刻: 2025-09-02 03:13:49 +0900 更新時刻: 2026-09-14 04:33:22 +0900