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Hillock-Free Homoepitaxial Diamond (100) Films Grown at High Methane Concentrations

Mitsuhiro Hamada, Tokuyuki Teraji, Toshimichi Ito.
Japanese Journal of Applied Physics 44 [No. 6] L216-L219. 2005.
https://doi.org/10.1143/jjap.44.l216

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