HOME > 論文 > 書誌詳細Tetramethylammonium hydroxide (TMAH) treatment of dry-etched trenches on (010) β-Ga2O3 to enhance trench profilesTakayoshi Oshima. AIP Advances 16 [2] 025145. 2026.https://doi.org/10.1063/5.0305647 Open Access AIP Publishing (Publisher) Materials Data Repository (MDR) NIMS著者大島 孝仁Materials Data Repository (MDR)上の本文・データセットMDRavailable Tetramethylammonium hydroxide (TMAH) treatment of dry-etched trenches on (010) β-Ga2O3 to enhance trench profiles 作成時刻: 2026-02-25 03:13:32 +0900 更新時刻: 2026-10-01 06:28:47 +0900
