Tetramethylammonium hydroxide (TMAH) treatment of dry-etched trenches on (010) β-Ga2O3 to enhance trench profiles | SAMURAI, NIMS Researchers Directory Service

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Tetramethylammonium hydroxide (TMAH) treatment of dry-etched trenches on (010) β-Ga2O3 to enhance trench profiles

Takayoshi Oshima.

AIP Advances 16 [2] 025145. 2026.

https://doi.org/10.1063/5.0305647

Open Access AIP Publishing (Publisher) Materials Data Repository (MDR)

NIMS author(s)

OSHIMA, Takayoshi

Fulltext and dataset(s) on Materials Data Repository (MDR)

MDRavailable Tetramethylammonium hydroxide (TMAH) treatment of dry-etched trenches on (010) β-Ga2O3 to enhance trench profiles

Created at: 2026-02-25 03:13:32 +0900 Updated at: 2026-11-02 06:28:15 +0900

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