Improvement in the crystalline quality of homoepitaxial diamond films by oxygen plasma etching of mirror-polished diamond substrates | SAMURAI, NIMS Researchers Directory Service

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Improvement in the crystalline quality of homoepitaxial diamond films by oxygen plasma etching of mirror-polished diamond substrates

Michinori Yamamoto, Tokuyuki Teraji, Toshimichi Ito.

Journal of Crystal Growth 285 [1-2] 130-136. 2005.

https://doi.org/10.1016/j.jcrysgro.2005.08.019

NIMS author(s)

TERAJI, Tokuyuki

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 14:52:50 +0900 Updated at: 2026-10-01 05:06:25 +0900

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