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Improvement in the crystalline quality of homoepitaxial diamond films by oxygen plasma etching of mirror-polished diamond substrates

Michinori Yamamoto, Tokuyuki Teraji, Toshimichi Ito.
Journal of Crystal Growth 285 [1-2] 130-136. 2005.
https://doi.org/10.1016/j.jcrysgro.2005.08.019

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