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Atomic-scale quantitative analysis of implanted Mg in annealed GaN layers on free-standing GaN substrates

Ashutosh Kumar, Jun Uzuhashi, Tadakatsu Ohkubo, Ryo Tanaka, Shinya Takashima, Masaharu Edo, Kazuhiro Hono.
Journal of Applied Physics 126 [23] 235704. 2019.

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