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Etching-Enhanced Surface Stress Relaxation during Initial Ozone Oxidation

Tetsuya Narushima, Masahiro Kitajima, Akiko N. Itakura, Akira Kurokawa, Shingo Ichimura, Kazushi Miki.
Surface Science 601 [5] 1384-1388. 2007.

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    作成時刻: 2016-05-24 15:09:04 +0900更新時刻: 2024-12-09 05:24:16 +0900

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