HOME > Article > DetailEtching-Enhanced Surface Stress Relaxation during Initial Ozone OxidationTetsuya Narushima, Masahiro Kitajima, Akiko N. Itakura, Akira Kurokawa, Shingo Ichimura, Kazushi Miki. Surface Science 601 [5] 1384-1388. 2007.https://doi.org/10.1016/j.susc.2007.01.006 NIMS author(s)ITAKURA, AkikoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 15:09:04 +0900Updated at: 2024-05-02 05:41:09 +0900
