傾斜試料ホルダーを用いた極低角度電子・イオン入射による超高深さ分解能オージェ深さ方向分析
(Ultra high depth resolution Auger depth profiling by both electron and ion beams at the glancing incidence using an inclined spe)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 16:22:16 +0900 Updated at: 2026-10-27 04:15:39 +0900