HOME > 論文 > 書誌詳細Local Oxidation Induced by Inhomogeneous Stress on Blistered Si Surface Shinichi Igarashi, Akiko N. Itakura, Masahiro Kitajima, Shinsuke Nakano, Shunsuke Muto, Tetsuo Tanabe, Hiroyuki Yamamoto, Kiichi Hojou. Japanese Journal of Applied Physics 45 [5A] 4179-4182. 2006.https://doi.org/10.1143/jjap.45.4179 NIMS著者板倉 明子Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 14:59:30 +0900更新時刻: 2024-03-30 00:43:23 +0900
