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Strain-enhanced high Q-factor GaN micro-electromechanical resonator

著者Liwen Sang, Meiyong Liao, Xuelin Yang, Huanying Sun, Jie Zhang, Masatomo Sumiya, Bo Shen.
掲載誌名Science and Technology of Advanced Materials 21 [1] 515-523
ISSN: 14686996
ESIでのカテゴリ: MATERIALS SCIENCE
出版社Informa UK Limited
発表年2020
言語English
DOIhttps://doi.org/10.1080/14686996.2020.1792257
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