Effect of Y Content in (TaC)$_{1-x}$Y$_{x}$ Gate Electrodes on Flatband Voltage Control for Hf-Based High-$k$ Gate Stacks
(Effect of Y Content in (TaC)1-xYx Gate Electrodes on Flatband Voltage Control for Hf-Based High-k Gate Stacks)
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Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2016-05-24 16:19:47 +0900更新時刻: 2025-01-16 06:18:56 +0900