HOME > 論文 > 書誌詳細Effects of Carbon Contaminations on Electron-Induced Damage of SiO2 Film Surface at Different Electron Primary EnergiesT. Nagatomi, H. Nakamura, Y. Takai, T. Ogiwara, T. Kimura, S. Tanuma. Journal of Surface Analysis 18 [1] 26-35. 2011.https://doi.org/10.1384/jsa.18.26 NIMS著者荻原 俊弥木村 隆Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 16:27:03 +0900更新時刻: 2024-09-06 05:00:57 +0900
