Remote plasma for damage-controlled fabrication of single-photon emitters in ultrathin hexagonal boron nitride
Souvik Bhattacharya, Swetapadma Sahoo, Haiyue Dong, Da Hye Hong, Takashi Taniguchi, Kenji Watanabe, Nadya Mason, Arend van der Zande, Simeon I. Bogdanov, R. Mohan Sankaran.
