Remote plasma for damage-controlled fabrication of single-photon emitters in ultrathin hexagonal boron nitride

Souvik Bhattacharya; Swetapadma Sahoo; Haiyue Dong; Da Hye Hong; Takashi Taniguchi; Kenji Watanabe; Nadya Mason; Arend van der Zande; Simeon I. Bogdanov; R. Mohan Sankaran; Souvik Bhattacharya; Swetapadma Sahoo; Haiyue Dong; Da Hye Hong; Takashi Taniguchi; Kenji Watanabe; Nadya Mason; Arend van der Zande; Simeon I. Bogdanov; R. Mohan Sankaran

doi:10.1063/5.0327648

Remote plasma for damage-controlled fabrication of single-photon emitters in ultrathin hexagonal boron nitride

Souvik Bhattacharya, Swetapadma Sahoo, Haiyue Dong, Da Hye Hong, Takashi Taniguchi, Kenji Watanabe, Nadya Mason, Arend van der Zande, Simeon I. Bogdanov, R. Mohan Sankaran.

Applied Physics Letters 128 [21] 214103. 2026.

https://doi.org/10.1063/5.0327648

NIMS author(s)

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Created at: 2026-06-02 03:07:04 +0900 Updated at: 2026-10-06 04:31:04 +0900