HOME > 論文 > 書誌詳細Features of atomic layer deposition and its application to electronic devicesToshihide Nabatame, Takashi Onaya. Applied Physics Express 19 [7] 070105. 2026.https://doi.org/10.35848/1882-0786/ae86ad Open Access IOP Publishing (Publisher) NIMS著者生田目 俊秀女屋 崇Materials Data Repository (MDR)上の本文・データセット作成時刻: 2026-08-01 03:05:37 +0900 更新時刻: 2026-09-02 07:03:06 +0900
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