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NIMS Award Symposium 2026

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Research

Keywords

窒化物半導体、ダイヤモンド半導体、MOCVD、光デバイス、電子デバイス

Society memberships

応用物理学会

Research Center for Electronic and Optical Materials
Title

Next-Generation Semiconductor-Based Photonic, Electronic, Magnetic, and Mechanical Devices

Keywords

III-nitride semiconductors, Diamond semiconductors, Oxide semiconductors, Light-emitting diodes, Photodetectors, Radiation detectors, Field-effect transistors, Magnetic devices, MEMS devices, Metalorganic vapor-phase epitaxy, Microwave plasma chemical vapor deposition

Overview

In the field of photonic, electronic, magnetic, and mechanical devices based on next-generation semiconductors, the use of wide-bandgap semiconductors as alternatives to Si is essential. I have long focused on III-nitride and diamond semiconductors because of their high potential for practical applications, and have been developing devices primarily based on these materials. At NIMS, we have established an integrated research framework in which crystal growth, device processing, and material characterization are closely coordinated, with continuous feedback among these activities.

Novelty and originality

● Development of Radiation and Proton Detectors Using Diamond and Oxide (Ga2O3) Semiconductors ● Development of Full-Visible-Spectrum Photonic Devices Using Micro-/Nanostructured InGaN-Based Nitride Semiconductors ● Development of High-Efficiency Ultraviolet Light-Emitting Diodes Using AlGaN-Based Nitride Semiconductors ● Development of High-Frequency Power Devices Using AlGaN/GaN and AlInN/GaN Heterostructures ● Development of Magnetic Devices Using BAlN- and ScAlN-Based Nitride Semiconductors ● Development of a Generalized MOVPE Crystal Growth Model Based on Elementary Processes ● High-Accuracy Prediction and Control of the Composition and Thickness of Nitride Alloys Using a Reduced Elementary-Process Model ● Development of Magnetic Sensors Using an Oxide Semiconductor (MgO)

Details

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As Example 1, I describe the development of a generalized MOVPE crystal growth model based on elementary processes and its application to the high-accuracy prediction and control of the composition and thickness of nitride alloys. Nitride semiconductors have been widely used in practical applications such as blue LEDs, solid-state lighting, and high-frequency wireless devices, and metalorganic vapor-phase epitaxy (MOVPE) is widely employed for the growth of high-quality crystalline layers. However, MOVPE involves complex interactions among precursor decomposition, gas-phase transport, surface incorporation, crystallization, and desorption. Because changes in growth parameters such as temperature, pressure, and gas flow rates strongly affect crystal quality, composition, and layer thickness, reproducing target values requires extensive experimentation and considerable time. Conventional models are based on detailed reaction processes and are therefore not well suited for general-purpose applications because of their high computational cost and the difficulty of parameter identification. In this study, we developed a generalized growth model that considers only simple elementary processes, namely, the incorporation efficiency of source materials and the desorption rates of constituent materials. Using this model, we demonstrated that the alloy composition and layer thickness during growth can be predicted and controlled with high accuracy solely from the gas-phase supply ratios of the source materials. These results enable simple yet highly accurate control of composition and layer thickness during crystal growth, which is essential for the fabrication of nitride semiconductor heterostructure devices.

Summary

Building on an understanding of the elementary processes involved in crystal growth and precise control of crystal growth, we are advancing the development of photonic, electronic, magnetic, and mechanical devices by fully exploiting the material properties of next-generation semiconductors, particularly III-nitride semiconductors. By conducting an integrated research program encompassing crystal growth, device design, fabrication, and characterization, we aim to elucidate the relationships between materials, crystal growth, and device properties and to realize high-performance, multifunctional next-generation semiconductor devices.
この機能は所内限定です。
この機能は所内限定です。

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