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Ti-Pd-Ni High Temperature Shape Memory Thin Films Formed with Carousel Type Magnetron Sputtering Apparatus
(カルーセル型マグネトロンスパッタリング装置を用いて作製したTi-Pd-Ni系高温形状記憶合金薄膜)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-26 23:52:02 +0900Updated at: 2017-03-17 01:57:51 +0900