HOME > Proceedings > DetailDiagnostics of Low Pressure Inductively Coupled VHF Plasma Used for Nanostructued Carbon DepositionOKADA, Katsuyuki. Proceedings of ISSP 2017 283-285. 2017.NIMS author(s)OKADA, KatsuyukiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2018-01-17 22:08:48 +0900Updated at: 2018-06-05 14:10:18 +0900