HOME > 会議録 > 書誌詳細Diagnostics of Low Pressure Inductively Coupled VHF Plasma Used for Nanostructued Carbon DepositionOKADA, Katsuyuki. Proceedings of ISSP 2017 283-285. 2017.NIMS著者岡田 勝行Materials Data Repository (MDR)上の本文・データセット作成時刻: 2018-01-17 22:08:48 +0900更新時刻: 2018-06-05 14:10:18 +0900
