HOME > Proceedings > DetailFabrication and investigation of tungsten deposit on both top and bottom surfaces of thin film substrateLIU, ZHIQUAN, MITSUISHI, Kazutaka, FURUYA, Kazuo. Proceedings of the 19th International Microprocesses and Nanotechnology Conference 192-193. 2006.NIMS author(s)MITSUISHI, KazutakaFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-27 01:09:01 +0900Updated at: 2017-03-17 03:08:39 +0900