HOME > Proceedings > DetailFine-Pitch Hybrid Bonding with Cu/Sn Microbumps and Adhesive for High Density 3D Integration(超微細Cu/Sn平滑電極と絶縁層の一括接合)Masaki Ohyama, Jun Mizuno, Syuichi Shoji, Masatsugu Nimura, Masatsugu Nimura, Toshihisa Nonaka, Yoichi Shinba, SHIGETOU, Akitsu. Proc. ICEP2014 604-607. 2014.NIMS author(s)SHIGETOU, AkitsuFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-27 02:33:26 +0900 Updated at: 2017-03-17 04:45:53 +0900