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Combinatorial investigation of ZrO2-based dielectric materials for DRAM capacitors

Yuji Kiyota, Yuji Iwashita, Kenji Itaka, Tetsuya Adachi, Toyohiro Chikyow, Atsushi Ogura.

ECS TRANSACTIONS . 2010.

https://doi.org/10.1149/1.3481622

NIMS author(s)

CHIKYO, Toyohiro

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2017-02-27 01:55:57 +0900 Updated at: 2026-11-04 04:58:58 +0900

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