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多元高周波マグネトロンスパッタ法による高品質Bi2Sr2CaCu2Oy超伝導薄膜の作製
(Preparation of High Quality Bi2Sr2CaCu2Oy Films by rf Magnetron Sputtering with Multi-targets)
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Created at: 2017-02-27 00:46:34 +0900Updated at: 2017-03-17 02:47:25 +0900