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VUV-assisted hybrid bonding of organic/inorganic substrate at atmospheric pressure
(真空紫外光照射と蒸気暴露の補佐による架橋層形成を利用した完全大気圧低温異種材料接合)
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-27 02:23:22 +0900 Updated at: 2017-03-17 04:33:59 +0900