HOME > 会議録 > 書誌詳細Electron Kinetics and Electron Energy Distribution Functions in a Low Pressure Inductively Coupled CH4/H2 PlasmaOKADA, Katsuyuki, KOMATSU, Shojiro, MATSUMOTO, Seiichiro. Proceedings of ISSP 2007 153-155. 2007.NIMS著者岡田 勝行Materials Data Repository (MDR)上の本文・データセット作成時刻: 2017-02-27 01:17:00 +0900 更新時刻: 2017-03-17 03:16:27 +0900
