SAMURAI - NIMS Researchers Database

HOME > 会議録 > 詳細

Formation of Isotopically Controlled Si Films from Fluoro-Silane

著者SUZUKI, Hiroshi, ARAKI, Hiroshi, NODA, Tetsuji.
発表誌名Proceedings of the 10th International Symposium on Advanced Physical Fields
発表年2005
言語English

▲ページトップへ移動