HOME > 会議録 > 書誌詳細Numerical Simulation of Low Pressure Inductively Coupled Plasma Used for Nanocrystalline Diamond DepositionOKADA, Katsuyuki, KOMATSU, Shojiro, MATSUMOTO, Seiichiro. Proceedings of Inter. COE Forum Plasma Sci. Technol. 159-160. 2004.NIMS著者岡田 勝行Materials Data Repository (MDR)上の本文・データセット作成時刻: 2017-02-27 00:33:44 +0900更新時刻: 2017-03-17 02:35:29 +0900
