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Homo/Heterogeneous Bonding of Cu, SiO2, and Polyimide by Low Temperature Vapor- Assisted Surface Activation Method
(150℃大気圧における銅,石英,ポリイミドの一括混載接合)

SHIGETOU, Akitsu, Tadatomo Suga.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2017-02-27 02:03:03 +0900Updated at: 2017-03-17 04:10:03 +0900

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