HOME > Proceedings > DetailHomo/Heterogeneous Bonding of Cu, SiO2, and Polyimide by Low Temperature Vapor- Assisted Surface Activation Method(150℃大気圧における銅,石英,ポリイミドの一括混載接合)SHIGETOU, Akitsu, Tadatomo Suga. Proceedings of 61st Electronic Components and Technology Conference 32-36. 2011.NIMS author(s)SHIGETOU, AkitsuFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-27 02:03:03 +0900Updated at: 2017-03-17 04:10:03 +0900