HOME > 会議録 > 書誌詳細Fabrication and investigation of tungsten deposit on both top and bottom surfaces of thin film substrateLIU, ZHIQUAN, MITSUISHI, Kazutaka, FURUYA, Kazuo. JAPANESE JOURNAL OF APPLIED PHYSICS 6254-6257. 2007.NIMS著者三石 和貴Materials Data Repository (MDR)上の本文・データセット作成時刻: 2017-01-08 04:22:14 +0900更新時刻: 2017-03-17 04:42:56 +0900