HOME > Proceedings > DetailPlanarization of zinc oxide surface and evaluation of processing damage(酸化亜鉛表面の平坦化と加工ダメージの評価)Hiroki Miyazaki, Yutaka Adachi, Isao Sakaguchi, Takamasa Ishigaki, Naoki Ohashi. KEY ENGINEERING MATERIALS 215-218. 2011.https://doi.org/10.4028/www.scientific.net/kem.485.215 NIMS author(s)ADACHI, YutakaSAKAGUCHI, IsaoOHASHI, NaokiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-27 01:56:26 +0900 Updated at: 2026-10-03 05:22:09 +0900