HOME > 会議録 > 書誌詳細Numerical Simulation of Low Pressure Inductively Coupled Plasma Sources for Nanocrystalline Diamond DepositionOKADA, Katsuyuki, KOMATSU, Shojiro, ISHIGAKI, Takamasa. Proceedings of ISPC-17 1-5. 2005.NIMS著者岡田 勝行Materials Data Repository (MDR)上の本文・データセット作成時刻: 2017-02-27 00:51:29 +0900 更新時刻: 2017-03-17 02:52:03 +0900
