HOME > 会議録 > 書誌詳細Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room TemperatureZilong Zhang, Zhijian Zhao, LIAO, Meiyong, Takahito Ono, Masaya Toda, Zilong Zhang, Zhijian Zhao, Takahito Ono, Masaya Toda. 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) 971-974. 2025.https://doi.org/10.1109/mems61431.2025.10917760 Open Access Materials Data Repository (MDR) NIMS著者廖 梅勇Materials Data Repository (MDR)上の本文・データセットMDRavailable Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature 作成時刻: 2025-11-12 03:08:34 +0900 更新時刻: 2026-09-23 04:35:05 +0900
