HOME > Proceedings > DetailElectron beam induced fabrication of nanostructure(電子ビームによるナノ構造の創製)TAKEGUCHI, Masaki, TANAKA, Miyoko, MITSUISHI, Kazutaka, FURUYA, Kazuo. Proc.ICEM 115-116. 2002.NIMS author(s)TAKEGUCHI, MasakiTANAKA, MiyokoMITSUISHI, KazutakaFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-27 00:08:02 +0900 Updated at: 2017-03-17 02:12:19 +0900