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Development of p-type Ion Implantation Technique for Realization of GaN Vertical MOSFETs

Ryo Tanaka, Shinya Takashima, Katsunori Ueno, Masahiro Horita, Jun Suda, Jun Uzuhashi, Tadakatsu Ohkubo, Masaharu Edo.

2023 21st International Workshop on Junction Technology (IWJT) . 2023.

https://doi.org/10.23919/iwjt59028.2023.10175173

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Created at: 2023-10-21 03:13:26 +0900Updated at: 2024-08-10 10:23:32 +0900

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