Physical Understanding of the Reliability Improvement of Dual High-k CMOSFETs with the Fifth Element Incorporation into HfSiON Gate Dielectrics
Motoyuki Sato, UMEZAWA, Naoto, N. Mise, S. Kamiyama, M. Kadoshima, T. Morooka, ADACHI, Tetsuya, CHIKYOW, Toyohiro, Kikuo Yamabe, Kenji Shiraishi, Seiichi Miyazaki, Akira Uedono, Keisaku Yamada, T. Aoyama, T. Eimori, Yasuo Nara, Y. Ohji.