HOME > 会議録 > 書誌詳細Guiding Principles for Preparing High Quality Microcrystalline Silicon at High Growth Rates(高品質微結晶シリコンの高速作製指針)NIIKURA, Chisato, Naho Itagaki, Akihisa Matsuda. Transactions of the Materials Research Society of Japan 503-506. 2006.NIMS著者新倉 ちさとMaterials Data Repository (MDR)上の本文・データセット作成時刻: 2017-02-27 00:58:49 +0900更新時刻: 2017-03-17 02:59:02 +0900