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STUDY OF CRYSTALLINE DEFECT GENERATION CAUSED BY LIGHT ELEMENT IMPURITIES IN SILICON SUBSTRATE

Tachibana Tomihisa, Sameshima Takashi, Kojima Takuto, Arafune Koji, Kakimoto Koichi, MIYAMURA, Yoshiji, HARADA, Hirofumi, SEKIGUCHI, Takashi, Ohshita Yoshio, Ogura Atshushi.
Technical digest of PVSEC-21 2D-1P-15-2D-1P-15. 2011.

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      Created at: 2017-02-27 02:08:01 +0900Updated at: 2017-03-17 04:15:52 +0900

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