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Pick and Place Operaion of a Micro Object with High Reliability and Precision Based on Micro Physics under SEM
(走査電子顕微鏡下特有のマイクロ物理学に基づいた微少物体の高再現性・高精度ピック・プレース操作)

斉藤滋規, MIYAZAKI, Hideki, 佐藤知正, 斉藤滋規, 佐藤知正.

Proceedings of the IEEE International Conference on Robotics and Automation 2736-3743. 1999.

NIMS author(s)

MIYAZAKI, Hideki

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2017-02-26 23:34:35 +0900Updated at: 2017-03-17 01:52:13 +0900

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