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Author斉藤滋規, MIYAZAKI, Hideki, 佐藤知正.
TitlePick and Place Operaion of a Micro Object with High Reliability and Precision Based on Micro Physics under SEM
(走査電子顕微鏡下特有のマイクロ物理学に基づいた微少物体の高再現性・高精度ピック・プレース操作)
Proceedings titleProceedings of the IEEE International Conference on Robotics and Automation
Year of publication1999
LanguageEnglish

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