HOME > 会議録 > 書誌詳細Diagnostics of Low Pressure Inductively Coupled VHF Plasma Used for Nanostructured Carbon DepositionOKADA, Katsuyuki, KOMATSU, Shojiro, MATSUMOTO, Seiichiro. Proceedings of ICPIG2007 1566-1567. 2007.NIMS著者岡田 勝行Materials Data Repository (MDR)上の本文・データセット作成時刻: 2017-02-27 01:18:32 +0900 更新時刻: 2017-03-17 03:18:10 +0900
