HOME > 会議録 > 書誌詳細Inelastic Processes in a Low Pressure Inductively Coupled CH4/H2 PlasmaOKADA, Katsuyuki, KOMATSU, Shojiro, MATSUMOTO, Seiichiro. Proceedings of ISPC-18 9999-9999. 2007.NIMS著者岡田 勝行Materials Data Repository (MDR)上の本文・データセット作成時刻: 2017-02-27 01:16:51 +0900 更新時刻: 2017-03-17 03:16:17 +0900
