In2O3 layers for chemical sensors: structural and surface characterization.
| 著者 | V. Brinzari, G. Korotcenkiv, K. Masek, V. Matolin, J. Libra, KAMEI, Masayuki. |
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| 発表誌名 | Proceeding of the 4th International Conference on Microelectronics and Computer Science |
| 発表年 | 2005 |
| 言語 | English |