HOME > Proceedings > DetailUV/Vapor-Assisted Hybrid Bonding Technology as a Tool for Future Nanopackaging(UV/Vapor-assisted手法による大気圧低温でのハイブリッド接合技術)SHIGETOU, Akitsu, AJAYAN, Mano, Jun Mizuno, Tadatomo Suga. Proc. IEEE NANO 2012 1708-1712. 2012.NIMS author(s)SHIGETOU, AkitsuFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-27 02:16:14 +0900Updated at: 2017-03-17 04:25:33 +0900