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UV/Vapor-Assisted Hybrid Bonding Technology as a Tool for Future Nanopackaging
(UV/Vapor-assisted手法による大気圧低温でのハイブリッド接合技術)

SHIGETOU, Akitsu, AJAYAN, Mano, Jun Mizuno, Tadatomo Suga.
Proc. IEEE NANO 2012 1708-1712. 2012.

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