HOME > Proceedings > DetailLow Temperature Bonding Technology in Ambient Air for 3D Hetero Integration of Mixed Substrates(異種信号3次元混載のための低温大気圧接合技術)SHIGETOU, Akitsu. New trends in nanomaterials design and engineering 1-5. 2010.NIMS author(s)SHIGETOU, AkitsuFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-27 01:55:34 +0900 Updated at: 2017-03-17 04:00:48 +0900