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Electron-beam-induced deposition of position and size controlled structures in nanometer scale
FURUYA, Kazuo,
MITSUISHI, Kazutaka,
SHIMOJO, Masayuki,
TAKEGUCHI, Masaki,
HASEGAWA, Akira,
TANAKA, Miyoko.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-27 00:47:17 +0900Updated at: 2017-03-17 02:48:05 +0900