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Compositional characterization of nano-materials and thin films with secondary ion massspectrometry

著者H. Haneda, K. Matsumoto, N. Saito, I. Sakaguchi, N. Ohashi, M. Fujimoto.
発表誌名Proceedings of IEEE International Nanoelectronics Conference (INEC) 2008
発表年2008
言語English
DOIhttps://doi.org/10.1109/inec.2008.4585450

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