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(Characteristics of Higher-k films fabricated by ALD and low annealing temperature process)
The AVS Topical Conference on Atomic Layer Deposition 2014 . June 15, 2014-June 18, 2014. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:42:29 +0900Updated at: 2024-03-05 11:45:07 +0900