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縦型立体構造デバイス実現に向けた半導体ナノワイヤの研究
(Development of semiconductor nanowires for the realization of vertical three-dimensional semiconductor devices)
第5回「革新的次世代デバイスを目指す材料とプロセス」領域会議. November 26, 2009-November 28, 2009. Invited
NIMS author(s)
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Created at: 2017-02-14 10:52:28 +0900Updated at: 2024-03-05 11:42:46 +0900