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摩擦力顕微鏡原子分解能観察による MOCVD-MoS2成膜過程の S 欠陥定量評価
(Atomic-scale quantitative evaluation of S defects during MOCVD-MoS2 film formation by friction force microscopy)
第73回応用物理学春季学術講演会. March 15, 2026-March 18, 2026.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2026-06-19 03:06:51 +0900 Updated at: 2026-06-19 03:06:51 +0900